I resolved the problem.

Lack of write permission to folder caused the error.

I have only one problem. I can not able to delete the sh3d files from the apache homes folder.

I have got exception:
System.UnauthorizedAccessException: Access to the path 'xxxx.sh3d' is denied.

I don't think the apache server will allow deleting. All rights are granted to the iis user. Copying (creating) and modifying also works well.

Is there a method available in javascript to delete this file?